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Semiconductor

타이틀

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Semiconductor

P810 Series (316L type)_Ultra high purity pressure gauge (EP grade)

P810 Series (316L type)

Service intended

P810 series are specially designed for the ultra-high purity gas distribution system used in a semiconductor, electronic, medical, biotechnology, and pharmaceutical industry.

Nominal diameter 35 (1½"), 50 (2") and 63 mm (2½")
Accuracy Grade A : 50 (2") and 63 mm (2½")
Grade B : 35 (1½"), 50 (2") and 63 mm (2½")
Scale range -0.1 ~ 0 to 0 ~ 28 MPa
Working pressure Steady pressure : 75 % of full scale value
Fluctuating pressure : 67 % of full scale value
Working temperature Ambient : -40 ~ 65 °C
Fluid : Max. 100 °C
Temperature effect Accuracy at temperature above and below the reference temperature (20 ℃) will be effected by approximately
±0.4 % per 10 ℃ of full scale

Standard features

Pressure connection Type 316L SS electropolished low mount or center back mount
surface finish Ra≤0.25 ㎛
■ ¼" NPT male thread
■ VCR® male or female face seal fitting
Element Type 316L SS
<6 MPa : C-type bourdon tube
≥6 MPa : Helical type bourdon tube
Case Type 304SS, Electropolished with pressure relief
Cover and window Twist-lock polycarbonate
Movement Stainless steel
Dial White aluminium with pointer stop pin
With black/red lettering, Dual pressure scale (bar/psi)
Pointer Black painted aluminium alloy
Helium leak rate Tested to confirm leakage rates of less than
10 mbar • ℓ/sec
Option 100 mm : P252 dimension
Certificates ATEX II 2G Ex h IIC T6...T1 Gb
ATEX II 2D Ex h IIIC T85°C....T450°C Db

© WISE Control Inc. All rights reserved. ALL PRODUCT, PRODUCT SPECIFICATIONS AND DATA ARE SUBJECT TO CHANGE WITHOUT NOTICE TO IMPROVE RELIABILITY, FUNCTION OR DESIGN OR OTHERWISE.

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