: Semiconductor

Service intended

P840 series are specially designed for the ultra-high purity gas distribution system used in a semiconductor, electronic, medical, biotechnology and pharmaceutical industry.

Nominal diameter	50 mm (2")
Switch point accuracy	±2.0 % of full scale
Scale range	0 ~ 28 MPa
Working pressure	Steady pressure : 75 % of full scale value Fluctuating pressure : 67 % of full scale value
Working temperature	Ambient : -20 ~ 65 °C Fluid : Max. 100 °C
Temperature effect	Accuracy at temperature above and below the reference temperature (20 ℃) will be effected by approximately ±0.4 % per 10 ℃ of full scale

Standard features

Mechanical

Pressure connection	Type 316L SS electropolished low mount or center back mount surface finish Ra≤0.25 ㎛ ■ ¼" NPT male thread ■ VCR® male or female face seal fitting
Element	Type 316L SS <6 MPa : C-type bourdon tube ≥6 MPa : Helical type bourdon tube
Case	Type 304SS, Electropolished with pressure relief
Cover and window	Twist-lock polycarbonate
Movement	Stainless steel
Pointer	Black painted aluminium alloy
Dial	White PVC, with pointer stop pin With black/red lettering, dual pressure scale (bar)
Helium leak rate	Tested to confirm leakage rates of less than 10 -9 mbar • ℓ/sec

Standard features

Electrical

Connection	26 AWG, PVC 6 feet (2 m)
Maximum switching current	0.5 amps AC/DC noninductive load
Maximum power	10 W/DC, 12 VA/AC
Maximum switching voltage	28 V AC/DC

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타이틀

P840 Series (316L type)_Ultra high purity pressure switch

P840 Series (316L type) (P841, P842, P843)

Attached files

Semiconductor

타이틀

Attached files

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